I'm a little late into this discussion but have a few thoughts anyway.
If you mentioned a ceiling height I missed it, and would recommend at least 10' for handling plywood sheets, etc.
Several have mentioned potential problems with duct clogging if placed within the slab. I used 4" schedule 40 PVC under my slab for the DC, with "wye's" to bring it up the the equipment drops and extended it beyond the slab at the end with a "cleanout" plug so I could remove any plugs. It's been in use for about four years and I've not had any problems with plugging, hooked to a 13" planer, router table, or cabinet saw. My only recommendation would be to use 6" instead of the 4" PVC and place the DC in a separate area filtering the return air with high quality filters available from Lowe's, etc. Even with a good DC you'll have some dust blowby and this will help with that as well as keep the noise down. I have added dropsheds that extend out 24' on three sides of my shop and 18' on the front for additional covered storage, and built a 6x8 room on one end that's outside of my main shop area for my DC and air compressor with two filtered return air openings through the wall into the shop.
When you run the electrical under the slab put each outlet on it's own circuit and use wiring large enough for your greatest anticipated need. That way you can drop down to 120v and 20amp breaker if that's what you need or go up to 220, depending on the tool.
What type of planer are you using? Mine is a Dewalt "portable" and I built a stand for it so that the output is the same height as my cabinet saw. My router table is huge, made from an old double pedestal desk, and I removed the legs and put it on a heavy frame on casters with the top the same height as the cabinet saw, planer, and my miter saw. This allows me to move the router table as needed to use it as an outfeed table or assembly table when not using the router. The paner, cabinet saw, miter saw, and bandsaw are also on casters.
If you're running the electrical from your house to the new building underground you should consider added conduits for telephone lines and perhaps wiring for a networked computer or cable TV. It won't cost much and now's the time to do it.
You can never get too many electrical outlets in the shop, and I have at least one outlet on each exterior wall outside the shop.
Good luck with your project. You'll enjoy it.
Glenn